Atomic layer deposition of titanium nitride for quantum circuits

“Atomic layer deposition of titanium nitride for quantum circuits,” (Featured on cover) A. Shearrow, G. Koolstra, S. J. Whiteley, N. Earnest, P. S. Barry, F. J. Heremans, D. D. Awschalom, E. Shirokoff, D. I. Schuster Appl. Phys. Lett., 113, 212601, 2018

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